Superhard protective antireflection diamond-like carbon films

Kaihu Fu; Yongqing Shen; Xu Zhang; Yangli Jin; Chengkui Zu; Yonghua Liu

doi:10.1117/12.2552976

31 January 2020 Superhard protective antireflection diamond-like carbon films

Kaihu Fu, Yongqing Shen, Xu Zhang, Yangli Jin, Chengkui Zu, Yonghua Liu

Proceedings Volume 11427, Second Target Recognition and Artificial Intelligence Summit Forum; 114273A (2020) https://doi.org/10.1117/12.2552976
Event: Second Target Recognition and Artificial Intelligence Summit Forum, 2019, Changchun, China

Abstract

Superhard protective antireflection Diamond-like carbon (DLC) film, consisting of a-C:H/ta-C, was fabricated using the combination of Plasma Enhanced Chemical Vapor Deposition (PECVD) and Filtered Cathodic Vacuum Arc (FCVA). The structure of a-C:H/ta-C film was analyzed by Raman, XPS, SEM, Infrared spectroscopy. Comparing with the conventional protective antireflection a-C:H film, a-C:H/ta-C film presents much higher nanohardness (52.82GPa), greatly enhanced wear resistance and unreduced infrared transmittance in 8~12μm waveband.

Citation Download Citation

Kaihu Fu, Yongqing Shen, Xu Zhang, Yangli Jin, Chengkui Zu, and Yonghua Liu "Superhard protective antireflection diamond-like carbon films", Proc. SPIE 11427, Second Target Recognition and Artificial Intelligence Summit Forum, 114273A (31 January 2020); https://doi.org/10.1117/12.2552976

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