Presentation + Paper
21 August 2020 X-ray interferometry technique using an x-ray microfocus laboratory source
Author Affiliations +
Abstract
X-ray reflecto-interferometry technique based on compound refractive lenses using an x-ray laboratory source was proposed to study thin-film structures. The setup for this experiment is very simple: a focused x-ray beam is reflected from parallel flat surfaces, which creates an interference pattern in a wide angular range, therefore the interference pattern can be obtained in a single shot without the need to rotate the sample or the detector. The reflecto-interferograms for Si3N4 membranes were obtained using the MetalJet Excillium micro-focus laboratory source with GaKα emission line at 9.25 keV. The experimentally obtained film thickness is in good agreement with the declared characteristics.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Voevodina, S. Lyatun, A. Barannikov, I. Lyatun, I. Snigireva, and A. Snigirev "X-ray interferometry technique using an x-ray microfocus laboratory source", Proc. SPIE 11492, Advances in Metrology for X-Ray and EUV Optics IX, 114920L (21 August 2020); https://doi.org/10.1117/12.2568499
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KEYWORDS
X-rays

X-ray optics

X-ray sources

Reflectometry

Lenses

Sensors

Thin films

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