Comparison Between Classical And Ion-Assisted Deposition On ZrO[sub]2[/sub] Layer For Optical Coating

Gao Yang; Zhou Pengfei

doi:10.1117/12.963006

22 December 1989 Comparison Between Classical And Ion-Assisted Deposition On ZrO₂ Layer For Optical Coating

Gao Yang, Zhou Pengfei

Proceedings Volume 1168, Current Developments in Optical Engineering and Commercial Optics; (1989) https://doi.org/10.1117/12.963006
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

A comparison has been made between classical and ion-assisted deposition (IAD) on Zr02 thin films and the optical and mechanical properties, laser damage resistance, crystalline structure and surface microstructure of the films were investigated and analyzed.

Citation Download Citation

Gao Yang and Zhou Pengfei "Comparison Between Classical And Ion-Assisted Deposition On ZrO₂ Layer For Optical Coating", Proc. SPIE 1168, Current Developments in Optical Engineering and Commercial Optics, (22 December 1989); https://doi.org/10.1117/12.963006

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