Author Affiliations +
Remi Le Tiec,1 Shimon Levi,2 Angela Kravtsov,2 Olga Novak,2 Cecilia Dupre,3 Cyril Vannuffel,3 Tristan Dewolf,3 Stephanie Garcia,3 Quentin Wilmart,3 Jonathan Faugier-Tovar3
1Applied Materials France (France)
2Applied Materials Israel, Ltd. (Israel)
3CEA-LETI (France)