A 2D electrothermal micromirror with feedback based on Hall-effect of piezoresistive sensors

Yue Tang; Jianhua Li; Lixin Xu; Huikai Xie

doi:10.1117/12.2582654

5 March 2021 A 2D electrothermal micromirror with feedback based on Hall-effect of piezoresistive sensors

Yue Tang, Jianhua Li, Lixin Xu, Huikai Xie

Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 1169718 (2021) https://doi.org/10.1117/12.2582654
Event: SPIE OPTO, 2021, Online Only

Abstract

In this paper, a new design of an electrothermal micromirror integrated with piezoresistive sensors is proposed. The micromirror is composed of four electrothermal bimorph actuators and four piezoresistive position sensors. In order to reduce the influence of temperature on piezoresistance, silicon dioxide can be used to thermally isolate the piezoresistive sensors from the silicon substrate. The optimized micromirror has a square mirror plate of 1800 * 1800 μm² and a footprint of 4040 * 4040 μm² , leading to a fill factor of 20%. The simulation results show that the optical fields of view of the micromirror are about 7° in the tilt and tip directions and the maximum piston displacement is close to 600 μm. The simulation results also show that the sensitivity and resolution of the piezoresistive sensors under a 3 V bias voltage are 2.88 mV/° and 0.4 μrad for the tip-tilt motion, respectively, and 0.056 mV/μm and 1.2 nm for the piston motion, respectively.

Citation Download Citation

Yue Tang, Jianhua Li, Lixin Xu, and Huikai Xie "A 2D electrothermal micromirror with feedback based on Hall-effect of piezoresistive sensors", Proc. SPIE 11697, MOEMS and Miniaturized Systems XX, 1169718 (5 March 2021); https://doi.org/10.1117/12.2582654

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KEYWORDS

Piezoresistive sensors

Micromirrors

Mirrors

Actuators

Finite element methods

Microelectromechanical systems

Image processing

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