UV-written silicon nitride integrated optical phased arrays

S. T. Ilie; G. De Paoli; A. Flint; T. Dominguez Bucio; P. Ginel-Moreno; J. Sagar; A. Ortega-Monux; K. Lekkas; T. Rutirawut; L. Mastronardi; I. Skandalos; I. Molina Fernandez; G. T. Kanellos; P. Cheben; P. G. R. Smith; J. C. Gates; F. Y. Gardes

doi:10.1117/12.2608824

5 March 2022 UV-written silicon nitride integrated optical phased arrays

S. T. Ilie, G. De Paoli, A. Flint, T. Dominguez Bucio, P. Ginel-Moreno, J. Sagar, A. Ortega-Monux, K. Lekkas, T. Rutirawut, L. Mastronardi, I. Skandalos, I. Molina Fernandez, G. T. Kanellos, P. Cheben, P. G. R. Smith, J. C. Gates, F. Y. Gardes

Author Affiliations +

Proceedings Volume 12005, Smart Photonic and Optoelectronic Integrated Circuits 2022; 1200504 (2022) https://doi.org/10.1117/12.2608824
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

Silicon nitride (SiNx), has been widely regarded as a CMOS photonics enabling material, facilitating the development of low-cost CMOS compatible waveguides and related photonic components. We have previously developed an NH3-free SiN PECVD platform in which its optical properties can be tailored. Here, we report on a new type of surface-emitting nitrogen-rich silicon nitride waveguide with antenna lengths of L < 5 mm. This is achieved by using a technique called small spot direct ultraviolet writing, capable of creating periodic refractive index changes ranging from -0.01 to -0.04. With this arrangement, a weak antenna radiation strength can be achieved, resulting in far-field beam widths < 0.0150, while maintaining a minimum feature size equal to 300 nm, which is compatible with DUV scanner lithography.

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Citation Download Citation

S. T. Ilie, G. De Paoli, A. Flint, T. Dominguez Bucio, P. Ginel-Moreno, J. Sagar, A. Ortega-Monux, K. Lekkas, T. Rutirawut, L. Mastronardi, I. Skandalos, I. Molina Fernandez, G. T. Kanellos, P. Cheben, P. G. R. Smith, J. C. Gates, and F. Y. Gardes "UV-written silicon nitride integrated optical phased arrays", Proc. SPIE 12005, Smart Photonic and Optoelectronic Integrated Circuits 2022, 1200504 (5 March 2022); https://doi.org/10.1117/12.2608824

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