Automated, deep reactive ion etching free fiber coupling to nanophotonic devices

Fabian Flassig; Rasmus Flaschmann; Thomas Kainz; Sven Ernst; Stefan Strohauer; Christian Schmid; Lucio Zugliani; Kai Müller; Jonathan J. Finley

doi:10.1117/12.2611160

5 March 2022 Automated, deep reactive ion etching free fiber coupling to nanophotonic devices

Fabian Flassig, Rasmus Flaschmann, Thomas Kainz, Sven Ernst, Stefan Strohauer, Christian Schmid, Lucio Zugliani, Kai Müller, Jonathan J. Finley

Author Affiliations +

Proceedings Volume 12009, Quantum Sensing and Nano Electronics and Photonics XVIII; 120090F (2022) https://doi.org/10.1117/12.2611160
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

Rapid development in integrated optoelectronic devices and quantum photonic architectures creates a need for optical fiber to chip coupling with low losses. Here we present a fast and generic approach that allows temperature stable self-aligning connections of nanophotonic devices to optical fibers. We show that the attainable precision of our approach is equal to that of DRIE-process based couplings. Specifically, the initial alignment precision is 1.2±0.4 μm, the average shift caused by mating < 0.5 μm, which is in the order of the precision of the concentricity of the employed fiber, and the thermal cycling stability is < 0.2 μm. From these values the expected overall alignment offset is calculated as 1.4 ± 0.4 μm. These results show that our process offers an easy to implement, versatile, robust and DRIE-free method for coupling photonic devices to optical fibers. It can be fully automated and is therefore scalable for coupling to novel devices for quantum photonic systems.

Conference Presentation

Citation Download Citation

Fabian Flassig, Rasmus Flaschmann, Thomas Kainz, Sven Ernst, Stefan Strohauer, Christian Schmid, Lucio Zugliani, Kai Müller, and Jonathan J. Finley "Automated, deep reactive ion etching free fiber coupling to nanophotonic devices", Proc. SPIE 12009, Quantum Sensing and Nano Electronics and Photonics XVIII, 120090F (5 March 2022); https://doi.org/10.1117/12.2611160

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available