Design and fabrication of silicon-based optical phased array

Wenliang Hu; Zhiqiang Qi; Haocheng Sun

doi:10.1117/12.2602869

24 November 2021 Design and fabrication of silicon-based optical phased array

Wenliang Hu, Zhiqiang Qi, Haocheng Sun

Proceedings Volume 12066, AOPC 2021: Micro-optics and MOEMS; 120660D (2021) https://doi.org/10.1117/12.2602869
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

Compared with the traditional mechanical scanning system, the silicon-based optical waveguide phased array has the advantages of fast scanning speed, low power consumption, small insertion loss, small size, light weight, and high integration. Therefore, it is used in intelligent driving, celestial navigation, genetic diagnosis, etc. Also many advanced fields such as new optical communications have huge application prospects. In this paper, theoretical simulation, layout drawing and device preparation are carried out on the device design of the silicon waveguide phased array system. The main research contents are as follows. First, by designing a reasonable cross-sectional size of the waveguide, it is verified that the SOI-based silicon optical waveguide has a lower electromagnetic wave loss in the local optical field in the TE mode. Secondly, the input grating coupler and output grating antenna structure for spatial optical waveguide transmission are designed, and the propagation direction and intensity distribution of the optical field in the grating coupler are obtained, indicating that the coupling efficiency and output efficiency are both greater than 50%. Meanwhile through the structure design and optimization of the multi-mode interferometer of multi-element phased array beam splitting, the output intensity reaches 90%. Finally, the 8-element and 16-element array layouts were drawn, and the corresponding all-solid phased array micro-nano structure was fabricated, the size of which was consistent with the design, laying the foundation for the next step of performance verification.

Citation Download Citation

Wenliang Hu, Zhiqiang Qi, and Haocheng Sun "Design and fabrication of silicon-based optical phased array", Proc. SPIE 12066, AOPC 2021: Micro-optics and MOEMS, 120660D (24 November 2021); https://doi.org/10.1117/12.2602869

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available