Simulation and application of spherical tool influence function for magnetorheological finishing

Hong-xiang Wang; Shi-wei Liu; Qing-hua Zhang; Jing Hou; Xian-hua Chen

doi:10.1117/12.2603930

13 December 2021 Simulation and application of spherical tool influence function for magnetorheological finishing

Hong-xiang Wang, Shi-wei Liu, Qing-hua Zhang, Jing Hou, Xian-hua Chen

Proceedings Volume 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies; 120710A (2021) https://doi.org/10.1117/12.2603930
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

Magnetorheological finishing (MRF) has been widely used in the field of modern optical machining due to the high certainty of processing. In the processing of spherical components, the detection means and sample preparation limit the acquisition of magnetorheological spherical tool influence function. In order to realize the high precision manufacturing of spherical components, the spherical removal function in the magneto-rheological polishing process is simulated and applied in practice. Based on the Preston equation, the material removal of the planar component was analyzed and the plane tool influence function model was established. On this basis, the correlation between spherical removal and plane removal was analyzed, and a simplified spherical tool influence function simulation method was proposed, and its accuracy was verified by experiments. Aiming at the processing of spherical components, the processing technology was improved and the actual processing was carried out. After processing, the PV value of the transmitted wavefront was 0.09λ, and the RMS value was 3.2 nm. The experimental results show that the spherical tool influence function simulated in this paper can be applied in actual processing and obtain a high-quality optical surface.

Citation Download Citation

Hong-xiang Wang, Shi-wei Liu, Qing-hua Zhang, Jing Hou, and Xian-hua Chen "Simulation and application of spherical tool influence function for magnetorheological finishing", Proc. SPIE 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies, 120710A (13 December 2021); https://doi.org/10.1117/12.2603930

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KEYWORDS

Polishing

Spherical lenses

Magnetorheological finishing

Surface finishing

Control systems

Fluid dynamics

Image processing

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