An effective control strategy for PMLSM velocity smoothness control at low-velocity of ultra-precision air bearing linear feed stage

Jinchun Yuan; Jiasheng Li; Wei Wei; Xingzhan Li; Pinkuan Liu

doi:10.1117/12.2615596

15 February 2022 An effective control strategy for PMLSM velocity smoothness control at low-velocity of ultra-precision air bearing linear feed stage

Jinchun Yuan, Jiasheng Li, Wei Wei, Xingzhan Li, Pinkuan Liu

Author Affiliations +

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 121662N (2022) https://doi.org/10.1117/12.2615596
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

In this paper, an effective and simple internal model control (IMC) with extended Kalman filter (EKF) is presented for low-velocity smoothness control of air bearing linear feed stage (ABLFS) driven by permanent magnet synchronous linear motors (PMLSMs). Firstly, the ABLFS is modeled as an inertia system with the nonlinear force ripples which correlates with phase current. The identification experiment is conducted using white noise method to get the approximate linear model of the air-bearing stage. Then, a typical linear feedback controller is derived from the standard IMC principle for the fundamental close-loop control. However, the IMC controller is sensitive to disturbances and modal uncertainties which limits the tracking accuracy. To overcome these drawbacks, the Kalman filter is employed as a state observer which makes the optimal estimation of system state variables (current, velocity and displacement). Since the Kalman filter is a synthesis process by calculating the probability density of measured values and predicted values, the results are more reliable to take place of the encoder feedback. Finally, the effectiveness of this modified method is validated by comparative experiments on a practical ABLFS system.

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Jinchun Yuan, Jiasheng Li, Wei Wei, Xingzhan Li, and Pinkuan Liu "An effective control strategy for PMLSM velocity smoothness control at low-velocity of ultra-precision air bearing linear feed stage", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 121662N (15 February 2022); https://doi.org/10.1117/12.2615596

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KEYWORDS

Filtering (signal processing)

Complex systems

Control systems

Lithium

Amplifiers

Feedback control

Motion models

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