Method for detecting surface roughness of silicon carbide substrate based on parallel differential confocal microscope

Yile Liu; Yi Dingrong; Xingxing Zhu; Yiqing Ye

doi:10.1117/12.2616420

15 February 2022 Method for detecting surface roughness of silicon carbide substrate based on parallel differential confocal microscope

Yile Liu, Yi Dingrong, Xingxing Zhu, Yiqing Ye

Author Affiliations +

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 121663I (2022) https://doi.org/10.1117/12.2616420
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

Silicon carbide belongs to the third generation of semiconductor materials. The silicon carbide substrate is the cornerstone of silicon carbide applications. It is gradually infiltrating the application in the field of new energy. Its surface roughness affects its conductivity and contact properties as a chip. Therefore, the detection of its roughness becomes more and more important. After experimentation, the existing mature commercial precision measuring instruments such as stylus profilometer and white light interferometer cannot simultaneously realize high-precision and non-destructive measurement in terms of principle and efficiency. This paper proposes a non-contact measurement method based on a parallel differential confocal microscope to measure its surface roughness. By moving the stage on the object side, the sample is imaged twice before and after the focus. The differential curve can get the height of the surface of the object, get the three-dimensional height of the surface to be measured, and then calculate the roughness value. After analyzing the measurement results, it is found that the measurement results have a certain degree of authenticity and reference. In this way, a measurement method based on a parallel confocal microscope is proposed, or the surface roughness of the silicon carbide substrate can be measured.

Citation Download Citation

Yile Liu, Yi Dingrong, Xingxing Zhu, and Yiqing Ye "Method for detecting surface roughness of silicon carbide substrate based on parallel differential confocal microscope", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 121663I (15 February 2022); https://doi.org/10.1117/12.2616420

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KEYWORDS

Confocal microscopy

Surface roughness

Silicon carbide

Microscopes

Image processing

Data processing

Atomic force microscope

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