AFM clean and nanomachining repair technology for future mask nodes

Maria J. Cadena; Tod Robinson

doi:10.1117/12.2641799

1 December 2022 AFM clean and nanomachining repair technology for future mask nodes

Maria J. Cadena, Tod Robinson

Proceedings Volume 12293, Photomask Technology 2022; 1229304 (2022) https://doi.org/10.1117/12.2641799
Event: SPIE Photomask Technology + EUV Lithography, 2022, Monterey, California, United States

Abstract

Photomask technological innovation has entered a new renaissance at the cutting edge due to the transition from 193 nm to extreme ultraviolet (EUV) in high volume production. EUV has allowed the manufacture of smaller and smaller features on the mask with more complex multilayer material stacks that allow for little dimensional error in both patterning and defect repair. To meet these, and other challenges, work has continued to develop material independent AFM nanomachining processes that enable next-generation tips with increasing aspect ratios. Repair results from the current best of breed process, a novel and advanced nanomachining technique, will be analyzed on the latest platforms for production. Data will be reviewed to show the process capability for single pass repair on EUV patterns using 1.8 aspect ratio (AR) NanoBits® while also looking forward to implementation to higher AR NanoBits. The process will be evaluated for dimensional control to target, cleanliness, tip wear, and throughput in defect repair in single-digit nanometer technology node patterns.

Conference Presentation

Citation Download Citation

Maria J. Cadena and Tod Robinson "AFM clean and nanomachining repair technology for future mask nodes", Proc. SPIE 12293, Photomask Technology 2022, 1229304 (1 December 2022); https://doi.org/10.1117/12.2641799

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available