Paper
9 September 2022 A SOI-based SiGe heterojunction phototransistor detector with enhanced light absorption capacity
Ruilang Ji, Hongyun Xie, Liang Chen, Xiaoting Shen, Xiaoxiong Yang, Dong Han, Weicong Na, Dongyue Jin, Wanrong Zhang
Author Affiliations +
Proceedings Volume 12328, Second International Conference on Optics and Image Processing (ICOIP 2022); 123280E (2022) https://doi.org/10.1117/12.2644185
Event: Second International Conference on Optics and Image Processing (ICOIP 2022), 2022, Taian, China
Abstract
High speed and high efficiency photodetectors are the key components in optical transmission, optical sensing and optical processing systems. Except performance requirements, cost control is also an aspect that must be considered in the current technological development. Therefore, silicon-based high-speed and high-efficiency chip level photodetectors that can be monolithic integrated with very large-scale CMOS integrated circuits have become the focus of research. SOI structure provides performance improvement for silicon-based HPT. We demonstrate a SOI-based SiGe Heterojunction Phototransistor which has greater light absorption compared with Si-based HPT. The influence of SOI structure on absorption and collector current of SiGe heterojunction phototransistor (HPT) are simulated and analyzed in this paper. When the optical power is 10mw, the collector current in SOI-based HPT reported in this paper can reach 4.6mA with 5.83% of light absorption calculated, while the collector current in Si-based HPT is 3.35mA with 4.48% of light absorption calculated under 940nm wavelength. The peak responsivity with SOI structure exhibits 2.82A/W which is enhanced by 12.8% than that of Si-based HPT.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ruilang Ji, Hongyun Xie, Liang Chen, Xiaoting Shen, Xiaoxiong Yang, Dong Han, Weicong Na, Dongyue Jin, and Wanrong Zhang "A SOI-based SiGe heterojunction phototransistor detector with enhanced light absorption capacity", Proc. SPIE 12328, Second International Conference on Optics and Image Processing (ICOIP 2022), 123280E (9 September 2022); https://doi.org/10.1117/12.2644185
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KEYWORDS
Absorption

Silicon

Phototransistors

Heterojunctions

Sensors

Photodetectors

Active optics

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