2D and 3D microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB)

Yoichi Toba; Yasutaka Hanada

doi:10.1117/12.2647945

17 March 2023 2D and 3D microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB)

Yoichi Toba, Yasutaka Hanada

Proceedings Volume 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; 124080D (2023) https://doi.org/10.1117/12.2647945
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

Laser-induced bubbles can be formed by focusing a conventional nanosecond (ns) laser in a liquid. We recently developed a microfabrication technique (microfabrication using laser-induced bubble (microFLIB)) and applied it to polydimethylsiloxane (PDMS), a thermoset polymer. The technique enabled the rapid fabrication of a high-quality microfluidic channel on a PDMS substrate and selective metallization of the channel via subsequent electroless plating. In addition, we found out that this technique enables true three-dimensional (3D) microfabrication of PDMS so that a hollow microfluidics can be embedded in the polymer substrate. Furthermore, a through hole having high aspect ratio of more than 200 can be fabricated by the single laser scanning. Therefore, in this presentation, we will introduce how the microFLIB works in detail and demonstrate surface microfabrication of PDMS and 3D microfabrication of hollow microstructures in PDMS. In the experiments, a ns laser beam was focused inside uncured liquid PDMS and was scanned to generate 2D and 3D line of laser-induced bubbles. In the microFLIB processing, the shape of the created bubbles was retained in the uncured PDMS for a while; thus, the line of bubbles generated by the laser scanning successfully produced a microfluidic channel on and inside the PDMS substrate after subsequent thermal curing. The developed microFLIB technique permits the high-speed and high-quality microfabrication of PDMS and can be applied to biochip applications.

Conference Presentation

Citation Download Citation

Yoichi Toba and Yasutaka Hanada "2D and 3D microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB)", Proc. SPIE 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, 124080D (17 March 2023); https://doi.org/10.1117/12.2647945

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