Cantilever-based photoacoustic sensor for terahertz range

Erkki Ikonen; Sucheta Sharma; Mohsen Ahmadi; Jussi Rossi; Markku Vainio; Zhipei Sun; Andreas Steiger

doi:10.1117/12.2647551

13 March 2023 Cantilever-based photoacoustic sensor for terahertz range

Erkki Ikonen, Sucheta Sharma, Mohsen Ahmadi, Jussi Rossi, Markku Vainio, Zhipei Sun, Andreas Steiger

Proceedings Volume 12420, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVI; 124200A (2023) https://doi.org/10.1117/12.2647551
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Advantages of photoacoustic detection with a silicon cantilever microphone are demonstrated in the THz range. In our method, earlier membrane microphone is replaced with robust silicon cantilever microphone, which can tolerate high intensity of the input radiation in contrast to vulnerable membrane. The responsivity of the photoacoustic sensor was confirmed to be constant over almost six orders of magnitude of input power, which is not easy to achieve with any other detector of THz radiation. Another favorable feature of the photoacoustic sensor is its uniform spatial responsivity over areas of several millimeters in size. Finally, we measured nearly constant spectral responsivity of the photoacoustic sensor for the wavelength range of 0.3 μm to 200 μm.

Conference Presentation

Citation Download Citation

Erkki Ikonen, Sucheta Sharma, Mohsen Ahmadi, Jussi Rossi, Markku Vainio, Zhipei Sun, and Andreas Steiger "Cantilever-based photoacoustic sensor for terahertz range", Proc. SPIE 12420, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVI, 124200A (13 March 2023); https://doi.org/10.1117/12.2647551

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