Spin-on-glass in the technology of InAs-based quantum cascade lasers

K. Kinjalk; A. Meguekam; D. Andres Díaz-Thomas; Z. Loghmari; M. Bahriz; R. Teissier; A. N. Baranov

doi:10.1117/12.2647567

15 March 2023 Spin-on-glass in the technology of InAs-based quantum cascade lasers

K. Kinjalk, A. Meguekam, D. Andres Díaz-Thomas, Z. Loghmari, M. Bahriz, R. Teissier, A. N. Baranov

Proceedings Volume 12440, Novel In-Plane Semiconductor Lasers XXII; 124400R (2023) https://doi.org/10.1117/12.2647567
Event: SPIE OPTO, 2023, San Francisco, California, United States

Conference Poster

Abstract

InAs-based quantum cascade lasers (QCL) demonstrated high performance in the long-wavelength mid-infrared range. Hard baked photoresist usually employed for electrical insulation in these devices exhibits some drawbacks related to the polymer nature of this material. Wire bonding is difficult because of the mechanical softness of the photoresist. Besides, optical properties of such insulator can be altered when the laser is operated at elevated temperature. Conventional dielectrics with potentially suitable characteristics introduce optical loss and/or current leakage when fabricated using standard deposition techniques. We report manufacturing of InAs-based QCLs using spin-on-glass that ensured high performance of the devices.

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K. Kinjalk, A. Meguekam, D. Andres Díaz-Thomas, Z. Loghmari, M. Bahriz, R. Teissier, and A. N. Baranov "Spin-on-glass in the technology of InAs-based quantum cascade lasers", Proc. SPIE 12440, Novel In-Plane Semiconductor Lasers XXII, 124400R (15 March 2023); https://doi.org/10.1117/12.2647567

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