The coherence function for optical metrology: a new paradigm and the role of information theory and compressed sensing

Ralf B. Bergmann; Claas Falldorf; Alberto Garcia Ortiz; André F. Müller; Mostafa Agour; Carsten Bockelmann

doi:10.1117/12.2675922

10 August 2023 The coherence function for optical metrology: a new paradigm and the role of information theory and compressed sensing

Ralf B. Bergmann, Claas Falldorf, Alberto Garcia Ortiz, André F. Müller, Mostafa Agour, Carsten Bockelmann

Author Affiliations +

Proceedings Volume 12619, Modeling Aspects in Optical Metrology IX; 1261902 (2023) https://doi.org/10.1117/12.2675922
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

The coherence function offers new possibilities for optical metrology not available with conventional wave field sensing. Its measurement involves spatio-temporal sampling of wave fields modulated by the object under investigation. While the evaluation of the coherence function is more elaborate than conventional approaches, an information theoretical treatment shows that it also delivers more information about the object under investigation. In order to achieve efficient information extraction from the coherence function, advanced approaches involving compressed sensing are required to obtain optical metrology techniques that are simultaneously precise, robust and fast as well as suited for complex measurement situations.

Conference Presentation

Citation Download Citation

Ralf B. Bergmann, Claas Falldorf, Alberto Garcia Ortiz, André F. Müller, Mostafa Agour, and Carsten Bockelmann "The coherence function for optical metrology: a new paradigm and the role of information theory and compressed sensing", Proc. SPIE 12619, Modeling Aspects in Optical Metrology IX, 1261902 (10 August 2023); https://doi.org/10.1117/12.2675922

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available