Studies of the molecular mechanism of dissolution inhibition of positive photoresists based on novolac-DNQ

Kenji Honda; Bernard T. Beauchemin Jr.; Rodney J. Hurditch; Andrew J. Blakeney; Yasumasa Kawabe; Tadayoshi Kokubo

doi:10.1117/12.20104

1 June 1990 Studies of the molecular mechanism of dissolution inhibition of positive photoresists based on novolac-DNQ

Kenji Honda, Bernard T. Beauchemin Jr., Rodney J. Hurditch, Andrew J. Blakeney, Yasumasa Kawabe, Tadayoshi Kokubo

Proceedings Volume 1262, Advances in Resist Technology and Processing VII; (1990) https://doi.org/10.1117/12.20104
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

effects in the development process. A comprehensive theory ofdissolution inhibition in novolak-DNQ (diazonaphthoquinone) resist is proposed, which is based on experimental studies of novolak-PAC (photoactive compound) interactions and the relationship between novolak microstructres and dissolution inhibition. The theory invokes a "two-step mechanism". Static molecular interactions between novolak and DNQ are augmented by secondary dynamic

Citation Download Citation

Kenji Honda, Bernard T. Beauchemin Jr., Rodney J. Hurditch, Andrew J. Blakeney, Yasumasa Kawabe, and Tadayoshi Kokubo "Studies of the molecular mechanism of dissolution inhibition of positive photoresists based on novolac-DNQ", Proc. SPIE 1262, Advances in Resist Technology and Processing VII, (1 June 1990); https://doi.org/10.1117/12.20104

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available