Fizeau interferometry-based, motion-free characterization of surface radius of curvature using actively-controlled varifocal optics

Minjae Kim; Arjent Imeri; Syed Azer Reza

doi:10.1117/12.2676446

4 October 2023 Fizeau interferometry-based, motion-free characterization of surface radius of curvature using actively-controlled varifocal optics

Minjae Kim, Arjent Imeri, Syed Azer Reza

Author Affiliations +

Proceedings Volume 12672, Applied Optical Metrology V; 1267207 (2023) https://doi.org/10.1117/12.2676446
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

In this paper, we present an optical setup which estimates the radius of curvature of spherical surfaces with the aid of Fizeau interferometry. While the use of Fizeau interferometry to achieve these measurements is wellunderstood in prior art and commercially deployed, we propose a variant of Fizeau interferometry for the same measurements. Our proposed method deploys electronically-controlled tunable focus lenses to perform cats-eye and confocal beam scans with a motion-free scanning system as opposed to a motion-based laser scanning and repositioning system. Eliminating motion from a surface scanning system mitigates system breakdowns related to bulk mechanical motion of optical elements. It also promises to reduce the system cost as well as bulkiness of such interferometric systems. We show the proposed system improvement via the use of a standard tunable focus lens on a legacy commercial Zygo surface curvature measuring system. We demonstrate the operation of the proposed system with experimental data and results using lenses and curved mirrors as samples. For all samples, we compare our measurements from the actively-tunable Fizeau interferometer to baseline measurements from the same original Zygo system using its own zoom lens. The experimental results show an excellent agreement between measurements from the motion-based legacy commercial system and the actively-tunable bulk motionfree system. Future work would focus on characterizing sample surface aberrations by subtracting wavefront aberrations imparted by the tunable focus lens piece.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Minjae Kim, Arjent Imeri, and Syed Azer Reza "Fizeau interferometry-based, motion-free characterization of surface radius of curvature using actively-controlled varifocal optics", Proc. SPIE 12672, Applied Optical Metrology V, 1267207 (4 October 2023); https://doi.org/10.1117/12.2676446

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