Tunable spontaneous-parametric down-conversion in III-V semiconductor waveguides heterogeneously integrated in the silicon platform

Albert Peralta Amores; Marcin Swillo

doi:10.1117/12.2687550

26 November 2023 Tunable spontaneous-parametric down-conversion in III-V semiconductor waveguides heterogeneously integrated in the silicon platform

Albert Peralta Amores, Marcin Swillo

Author Affiliations +

Proceedings Volume 12775, Quantum and Nonlinear Optics X; 127750Y (2023) https://doi.org/10.1117/12.2687550
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

The generation of counter-propagating photon pairs via out-of-plane pumping is demonstrated in InGaP waveguides molecularly bonded to wet thermal oxide. A generation rate of (5.1 ± 1.2) 10² pairs/s is measured with 2.6mW of pump power inside a 1mm long and 250nm thick InGaP waveguide. The pump configuration allows compensation of the momentum mismatch between orthogonally polarized photons propagating in opposite direction. Degenerated counter-propagating spontaneous photon pair generation is demonstrated in a 2mm long and 235nm thick InGaP waveguide within the 1400 to 1600nm window via photon-correlation measurements. A red(blue)-shift of 190(160)nm in the counter-propagating TE(TM)-like modes is measured when tilting the pump 19.5º to achieve degenerated generation of photon pairs at 1600nm. An increase of the pair generation rate to (1.7 ± 0.4) 10³ pairs/s at 1550nm, attributed to a larger overlap between the interacting fields has been observed when tilting the pump 18.9º. The fabrication process including heterogeneous integration of 200 to 250nm thick and 1 to 2mm long doubly inverse tapered waveguides on SiO2 and thermally oxidized Silicon substrates via native oxide molecular bonding is presented.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Albert Peralta Amores and Marcin Swillo "Tunable spontaneous-parametric down-conversion in III-V semiconductor waveguides heterogeneously integrated in the silicon platform", Proc. SPIE 12775, Quantum and Nonlinear Optics X, 127750Y (26 November 2023); https://doi.org/10.1117/12.2687550

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KEYWORDS

Waveguides

Silicon

Group III-V semiconductors

Silica

Indium gallium phosphide

Oxides

Photon counting

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