Pre-designment of a highly sensitive nanophotonic pressure sensor

Igor O. Mikhaylov; Ekaterina I. Shtanko

doi:10.1117/12.2688133

17 October 2023 Pre-designment of a highly sensitive nanophotonic pressure sensor

Proceedings Volume 12780, 29th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics; 127801P (2023) https://doi.org/10.1117/12.2688133
Event: XXIX International Symposium "Atmospheric and Ocean Optics, Atmospheric Physics", 2023, Moscow, Russian Federation

Abstract

The paper considers the constructive implementation of the nanophotonic sensor of comprehensive application, proposed by the authors earlier and investigated using computer simulation. Here we investigate one of the constructive solutions of a supersensitive pressure sensor based on nanostructures, providing miniaturization of sensors and their application in various technical products. Based on the previously conducted mathematical simulation of the process of high-frequency electromagnetic radiation propagation through a nanocones array, which is the essential element of the proposed design, justified decisions about the overall dimensions of the structure, its internal structure, and the optimal frequency of the field excitation source are made. This work solves, in particular, the problem of protecting the sensor’s internal structure from external electromagnetic fields. Employing solid-state modeling, the linearly reciprocating motion of the sensor plates under external loading in the proposed device design is confirmed.

Citation Download Citation

Igor O. Mikhaylov and Ekaterina I. Shtanko "Pre-designment of a highly sensitive nanophotonic pressure sensor", Proc. SPIE 12780, 29th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics, 127801P (17 October 2023); https://doi.org/10.1117/12.2688133

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