Paper
1 October 1990 Plasma luminescence spectroscopy for sputtering growth of high Tc superconductors
Sang Seop Yom, Yohee Kim, Sang Sam Choi
Author Affiliations +
Proceedings Volume 1287, High Tc Superconductivity: Thin Films and Applications; (1990) https://doi.org/10.1117/12.20898
Event: Advances in Semiconductors and Superconductors: Physics Toward Devices Applications, 1990, San Diego, CA, United States
Abstract
We present in situ real-time monitoring of emission lines from rf induced plasma of elemental and ionized species from target of YBaCu3O7 compounds during the sputtering growth. Abundances of the ionized and/or neutral species rather than clusters were observed while relative composition of the species was varied by target composition, applied rf power, gas pressure, and location of substrate. We discuss usefulness of real time monitoring of ejected species which depend on rf power and gas pressure during the sputtering deposition of high Tc superconducting thin films.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sang Seop Yom, Yohee Kim, and Sang Sam Choi "Plasma luminescence spectroscopy for sputtering growth of high Tc superconductors", Proc. SPIE 1287, High Tc Superconductivity: Thin Films and Applications, (1 October 1990); https://doi.org/10.1117/12.20898
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KEYWORDS
Sputter deposition

Plasma

Copper

Thin films

Plasma spectroscopy

Spectroscopy

Luminescence

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