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β-Ga2O3 is an ultrawide bandgap semiconductor that shows promise for high-power, deep-UV, and extreme environment applications. Hydrogen can affect the conductivity of β-Ga2O3 through the introduction of shallow donors and the passivation of deep acceptors. This work is a study of the interaction of H with VGa deep acceptors as well as other impurities in β-Ga2O3 by IR spectroscopy and complementary theory.
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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Michael Stavola, W. Beall Fowler, Amanda Portoff, Andrew Venzie, Evan R. Glaser, Stephen J. Pearton, "O-H centers in β-Ga2O3 with a Ga(1) vacancy at their core," Proc. SPIE 12887, Oxide-based Materials and Devices XV, 1288708 (15 March 2024); https://doi.org/10.1117/12.3009619