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13 March 2024 Using MOCVD technology to meet key process requirements that enable micro LEDs
Mark McKee, Bojan Mitrovic, Eric Armour, Jay Montgomery
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Proceedings Volume 12906, Light-Emitting Devices, Materials, and Applications XXVIII; 129060U (2024) https://doi.org/10.1117/12.3008901
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
MicroLEDs are projected to have triple-digit growth over the next five years and will have significant benefits for new and existing display applications. MicroLEDs will see high demand in applications such as smartwatches, mobile devices, AR/VR, automotive and TVs. Critical in the manufacturing of these devices is MOCVD epitaxial growth technology. This technology must meet industry’s high-performance requirements, including extremely uniform wavelength, thickness and composition, dopant control and low defectivity while reducing costs via high productivity, high yields and lower operating expenses. These requirements must also be met over the whole wafer as well as across the transfer field. Veeco has developed the Lumina™ As/P MOCVD for Red MicroLEDs that meet and exceed industry’s roadmap on 8” substrates. Details of the technology and data will be discussed as part of this presentation.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Mark McKee, Bojan Mitrovic, Eric Armour, and Jay Montgomery "Using MOCVD technology to meet key process requirements that enable micro LEDs", Proc. SPIE 12906, Light-Emitting Devices, Materials, and Applications XXVIII, 129060U (13 March 2024); https://doi.org/10.1117/12.3008901
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KEYWORDS
Semiconducting wafers
Metalorganic chemical vapor deposition
Yield improvement
Industrial applications
Light emitting diodes
Photoluminescence
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