3D-manufactured soft haptic actuators utilizing electrostatically driven pneumatic valves

I-Hui Chien; I-Lun He; Yu-Chuan Su; Chih-Cheng Cheng; Chen-Tsai Yang

doi:10.1117/12.3010160

9 May 2024 3D-manufactured soft haptic actuators utilizing electrostatically driven pneumatic valves

I-Hui Chien, I-Lun He, Yu-Chuan Su, Chih-Cheng Cheng, Chen-Tsai Yang

Proceedings Volume 12948, Soft Mechatronics and Wearable Systems; 129480A (2024) https://doi.org/10.1117/12.3010160
Event: SPIE Smart Structures + Nondestructive Evaluation, 2024, Long Beach, California, United States

Abstract

We have successfully demonstrated a diaphragm-type pneumatic valve capable of amplifying electrostatic actuation and attenuating air pressure applied onto the diaphragm. When a high voltage is applied between the flexible electrode coated on top of the diaphragm and an underneath ground electrode, the electrostatic attraction induces a zipping motion of the diaphragm. The actuation of the pneumatic valve can seal an air chamber and maintain its internal pressure at a high level, which drives a circular elastomer membrane to form a bump and stimulate the skin. If the applied voltage falls below a certain threshold, air bypasses the diaphragm to the atmosphere and causes a sharp drop of the inter pressure, whose magnitude is controlled by a dedicated fluidic resistor located upstream. By manipulating pressure, the electrically-driven valve can control the movement of the membrane and the stimulation to the skin. In the prototype demonstration, structures are 3D manufactured, selectively coated with silver electrodes, and integrated to realize the proposed actuator with 1 cm³ in volume. The fabricated circular elastomer membrane of 3 mm in diameter and 0.1 mm in thickness forms a bump of 0.5 mm in height under an air pressure of 10 kPa, which requires a voltage of >472 V for the valve to maintain. While the voltage is lower than 472 V, the pressure drops and the membrane moves down. Once a voltage of >814 V is applied, it seals the chamber and forms the bump again. Therefore, haptic actuation can be generated as desired.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

I-Hui Chien, I-Lun He, Yu-Chuan Su, Chih-Cheng Cheng, and Chen-Tsai Yang "3D-manufactured soft haptic actuators utilizing electrostatically driven pneumatic valves", Proc. SPIE 12948, Soft Mechatronics and Wearable Systems, 129480A (9 May 2024); https://doi.org/10.1117/12.3010160

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