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Thin film thermocouples are widely used for temperature measurement because of their high measurement accuracy, low thermal inertia, and small size. The static calibration method is an important factor in determining the temperature measurement accuracy of thin film thermocouples. Different calibration methods will result in different Seebeck coefficients obtained. The calibration methods studied so far can make the calibration process difficult to obtain accurate Seebeck coefficient values due to the mismatch between the distribution of the temperature field and the physical dimensions of the thin-film thermocouple. In this paper, we first designed and prepared NiCr/NiSi thin film thermocouples, and then characterized and analyzed their film thickness, structure, and composition, and built a multichannel fast acquisition thin film thermocouple static calibration system to calibrate the prepared NiCr/NiSi thin film thermocouples. The results show that the NiCr/NiSi thin film thermocouple designed and prepared in this paper meets the requirements of temperature measurement, the static calibration system built to test the standard K-type patch thermocouple Seebeck coefficient of the difference between the standard and the standard is only 0.3%and can be realized at the same time 9 groups of static calibration and Seebeck coefficient of consistency is good. This paper intends to solve the problem of difficult and inaccurate calibration of Seebeck coefficient in the temperature measurement process of thin film thermocouples and promote the efficient application of thin film thermocouples in temperature measurement and other fields.
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