With the development of scientific research, the stability of synchrotron radiation has been paid more attention. The liquid vibration will change the liquid flow state, cause the vibration of the pipe surface, and lead to the crystal jitter. Aiming at the stability requirements of the high-stability monochromator of the partial beam line of SSRF, ANSYS workbench software was used to analyze and optimize the structure, and a cooling pipe system with more stable structure was designed. This paper also analyzes the effect of cooling system vibration on crystal. The test results of the prototype show that the resolution of the device can reach 1 urad and the repetition accuracy is less than 1.071 urad. All the indexes meet the needs of the monochromator.
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