Silicon nitride based Mech-Zehnder thermo-optic switch

Siyang Zhou; Shuojian Zhang; Jia Guo; Zhuping Fan; Xiao Ma; Jian-Jun He

doi:10.1117/12.3022274

18 March 2024 Silicon nitride based Mech-Zehnder thermo-optic switch

Siyang Zhou, Shuojian Zhang, Jia Guo, Zhuping Fan, Xiao Ma, Jian-Jun He

Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 131041I (2024) https://doi.org/10.1117/12.3022274
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China

Abstract

A 2 × 2 Mech-Zehnder thermo-optic switch based on a 250 nm-thick silicon nitride platform is designed and fabricated. The measured excess on-chip loss is 0.3 dB and the extinction ratio is 31 dB.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Siyang Zhou, Shuojian Zhang, Jia Guo, Zhuping Fan, Xiao Ma, and Jian-Jun He "Silicon nitride based Mech-Zehnder thermo-optic switch", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 131041I (18 March 2024); https://doi.org/10.1117/12.3022274

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