Application of IBE etching process in EBAPS device

Huaiyun Fan; Hesheng Tan; Yaobin Li; Yongfa Dong; Shiqi Yang; Xin Zhang; Huabing Deng; Zhou Fang; Dongwen Hu; Zhujun Chu; Linwei Song

doi:10.1117/12.3023680

18 March 2024 Application of IBE etching process in EBAPS device

Huaiyun Fan, Hesheng Tan, Yaobin Li, Yongfa Dong, Shiqi Yang, Xin Zhang, Huabing Deng, Zhou Fang, Dongwen Hu, Zhujun Chu, Linwei Song

Author Affiliations +

Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 131045J (2024) https://doi.org/10.1117/12.3023680
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China

Abstract

Electron bombardment active pixel sensor (EBAPS) is a new type of night vision imaging digital device. It has outstanding characteristics such as all-weather, small size, light weight, and large dynamic range, which has attracted widespread attention in the fields of biological detection, high-energy physics, and low-light night vision imaging. In this paper, an EBAPS device for low-light imaging was prepared, the APS image sensor chip was etched and backside grinded by ion beam etching (IBE) equipment. Taguchi's experimental design was used to investigate the effects of IBE etching energy, beam current and angle on the surface roughness and etching depth of the passivation film layer on the surface of APS image sensor. The electron bombardment imaging under 5×10-⁵lx illumination is realized by applying the most effective process parameters to EBAPS devices.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Huaiyun Fan, Hesheng Tan, Yaobin Li, Yongfa Dong, Shiqi Yang, Xin Zhang, Huabing Deng, Zhou Fang, Dongwen Hu, Zhujun Chu, and Linwei Song "Application of IBE etching process in EBAPS device", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 131045J (18 March 2024); https://doi.org/10.1117/12.3023680

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Etching

Surface roughness

Passivation

Silicon

Back illuminated sensors

Light sources and illumination

Aluminum

Show All Keywords

Keywords/Phrases

Search In:

Publication Years