Design of a perceptual-coupled plasma simulation system based on COMSOL

Rui Huang; Ying Wang; Hui Wang; Yunlong Liu

doi:10.1117/12.3028997

22 May 2024 Design of a perceptual-coupled plasma simulation system based on COMSOL

Rui Huang, Ying Wang, Hui Wang, Yunlong Liu

Proceedings Volume 13176, Fourth International Conference on Machine Learning and Computer Application (ICMLCA 2023); 1317616 (2024) https://doi.org/10.1117/12.3028997
Event: Fourth International Conference on Machine Learning and Computer Application (ICMLCA 2023), 2023, Hangzhou, China

Abstract

By studying the basic principle of ICP and the characteristics of low-temperature plasma, the advantages of using a plasma metal cylinder discharge chamber are discussed, and the influence of skin effect on discharge effect is deeply investigated. COMSOL multi-physics finite element software is used to analyze the physical characteristics of the sensitively coupled plasma. The results show that COMSOL has high feasibility and accuracy in numerical simulation of the perceptual-coupled plasma, which provides theoretical and technical support for the application of plasma in material processing, environmental purification, and other fields.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Rui Huang, Ying Wang, Hui Wang, and Yunlong Liu "Design of a perceptual-coupled plasma simulation system based on COMSOL", Proc. SPIE 13176, Fourth International Conference on Machine Learning and Computer Application (ICMLCA 2023), 1317616 (22 May 2024); https://doi.org/10.1117/12.3028997

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