Paper
1 July 1990 Periodic structure imaging by near-field microscopy
Christian Pieralli, S. Leblanc, Alain Jalocha
Author Affiliations +
Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34814
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany
Abstract
Two techniques of nearfield microscopy using external and internal reflections are presented and the influence of polarization is discussed in the case of periodic struc ture imaging.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christian Pieralli, S. Leblanc, and Alain Jalocha "Periodic structure imaging by near-field microscopy", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34814
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