Fabrication and analysis of Mo-Si multilayers

Lawrence Shing; Richard C. Catura

doi:10.1117/12.51220

1 January 1992 Fabrication and analysis of Mo-Si multilayers

Lawrence Shing, Richard C. Catura

Proceedings Volume 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics; (1992) https://doi.org/10.1117/12.51220
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Molybdenum-Silicon (Mo-Si) multilayers have been fabricated in our laboratory for reflecting various soft x-ray wavelengths. Several normal incidence mirrors have been produced for a solar sounding rocket flight. Using properly shaped masks on 3 in. diameter dc magnetrons, we can produce multilayers of a similar size having a uniformity of better than +/- 3 over their entire surface area. Peak reflectance of the multilayers are as high as 42 at 171 angstroms. Efforts are underway to deposit several layers of different period on top of the multilayers in order to attenuate the reflection of 304 angstroms, a very bright line of He II in the solar spectrum. In the interim, we have made a Mo-Si mirror that reflects at 304 angstroms. In addition to obtaining information on the solar corona at this wavelength, this will greatly reduce the effects of the He II line when its image is appropriately subtracted from others. These results and a discussion of the current status of our multilayer research is presented.

Citation Download Citation

Lawrence Shing and Richard C. Catura "Fabrication and analysis of Mo-Si multilayers", Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); https://doi.org/10.1117/12.51220

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