Soft x-ray reflectometry of multilayer coatings using a laser-plasma source

David L. Windt; Warren K. Waskiewicz

doi:10.1117/12.51277

1 January 1992 Soft x-ray reflectometry of multilayer coatings using a laser-plasma source

David L. Windt, Warren K. Waskiewicz

Proceedings Volume 1547, Multilayer Optics for Advanced X-Ray Applications; (1992) https://doi.org/10.1117/12.51277
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

A new high-resolution soft x-ray reflectometer system utilizing a laser-plasma light source is described. This reflectometer is used to measure the reflectance of multilayer-coated optics for projection lithography. A detailed description of the instrument is presented, along with recent results obtained for a variety of soft x-ray multilayer coatings, multilayer-coated figured optics, and patterned x-ray reflection masks

Citation Download Citation

David L. Windt and Warren K. Waskiewicz "Soft x-ray reflectometry of multilayer coatings using a laser-plasma source", Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); https://doi.org/10.1117/12.51277

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available