Tool and mark design factors that influence optical overlay measurement errors

Patrick M. Troccolo; Nigel P. Smith; Tara Zantow

doi:10.1117/12.59791

1 June 1992 Tool and mark design factors that influence optical overlay measurement errors

Patrick M. Troccolo, Nigel P. Smith, Tara Zantow

Proceedings Volume 1673, Integrated Circuit Metrology, Inspection, and Process Control VI; (1992) https://doi.org/10.1117/12.59791
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

The measurement of overlay error by optical instruments is subject to systematic error, sometimes known as tool induced shift, or TIS. Some investigations into the relationship between the mark structure and the properties of the instrument have been conducted, but the effects are still poorly understood. In this paper we report on experiments designed to investigate further the relationship between the mark structure, the alignment of the instrument and the resultant TIS error in the measurements. The optical images of wafers manufactured with overlay marks of known offsets and step heights look the same and enable us to distinguish between geometrical and optical effects. By varying the alignment of various optical elements in the tool, the resultant TIS data allows determination of the most critical instrument parameters which must be controlled before accurate measurements can be made.

Citation Download Citation

Patrick M. Troccolo, Nigel P. Smith, and Tara Zantow "Tool and mark design factors that influence optical overlay measurement errors", Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); https://doi.org/10.1117/12.59791

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available