Dielectric functions and critical point transitions of single strained and relaxed InxGa1-xAs/GaAs epilayers studied by spectroscopic ellipsometry and photoreflectance

Roger Timothy Carline; Christopher Pickering; N. S. Garawal; David Lancefield; Leslie K. Howard; M. T. Emeny

doi:10.1117/12.60463

1 July 1992 Dielectric functions and critical point transitions of single strained and relaxed InxGa1-xAs/GaAs epilayers studied by spectroscopic ellipsometry and photoreflectance

Roger Timothy Carline, Christopher Pickering, N. S. Garawal, David Lancefield, Leslie K. Howard, M. T. Emeny

Author Affiliations +

Proceedings Volume 1678, Spectroscopic Characterization Techniques for Semiconductor Technology IV; (1992) https://doi.org/10.1117/12.60463
Event: Semiconductors '92, 1992, Somerset, NJ, United States

Abstract

Dielectric functions of strained In_xGa_1-xAs (x approximately 0.1, 0.2, 0.24) measured by spectroscopic ellipsometry are presented for the first time. Critical point transition energies obtained from differential spectra are correlated with photoreflectance measurements to provide information on layer thickness, composition, and strain.

Citation Download Citation

Roger Timothy Carline, Christopher Pickering, N. S. Garawal, David Lancefield, Leslie K. Howard, and M. T. Emeny "Dielectric functions and critical point transitions of single strained and relaxed InxGa1-xAs/GaAs epilayers studied by spectroscopic ellipsometry and photoreflectance", Proc. SPIE 1678, Spectroscopic Characterization Techniques for Semiconductor Technology IV, (1 July 1992); https://doi.org/10.1117/12.60463

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available