Diffractive optical elements fabricated by laser direct writing and other techniques

Pierre Langlois; Hubert Jerominek; Luc Leclerc; Jin Pan

doi:10.1117/12.142573

13 January 1993 Diffractive optical elements fabricated by laser direct writing and other techniques

Pierre Langlois, Hubert Jerominek, Luc Leclerc, Jin Pan

Proceedings Volume 1751, Miniature and Micro-Optics: Fabrication and System Applications II; (1993) https://doi.org/10.1117/12.142573
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Four different thin DOE pattern generation techniques used at National Optics Institute (NOI) are discussed and compared: laser direct writing in photoresist, microlithography with e-beam masks, holographic recording, and laser assisted microfabrication. NOI special equipment used for each technique is described and applications are presented.

Citation Download Citation

Pierre Langlois, Hubert Jerominek, Luc Leclerc, and Jin Pan "Diffractive optical elements fabricated by laser direct writing and other techniques", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); https://doi.org/10.1117/12.142573

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