Investigation of submillimeter components by heterodyne holographic interferometry and computational methods

Gordon C. Brown; Ryszard J. Pryputniewicz

doi:10.1117/12.140760

5 February 1993 Investigation of submillimeter components by heterodyne holographic interferometry and computational methods

Gordon C. Brown, Ryszard J. Pryputniewicz

Author Affiliations +

Proceedings Volume 1755, Interferometry: Techniques and Analysis; (1993) https://doi.org/10.1117/12.140760
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Stroboscopic heterodyne holographic interferometry, and computational methods were used to study vibrations of submillimeter size cantilever beams. The holographic method described performs phase measurements on an image which has been magnified up to 20 X. With the ability to measure vibration amplitudes with an accuracy of 1/1000 of one fringe, an effective measurement was made every 50 microns along the surface of the object. Both analytical and finite element method solutions were obtained and comparison to experimental results showed good correlation.

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Gordon C. Brown and Ryszard J. Pryputniewicz "Investigation of submillimeter components by heterodyne holographic interferometry and computational methods", Proc. SPIE 1755, Interferometry: Techniques and Analysis, (5 February 1993); https://doi.org/10.1117/12.140760

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