Organic polymer integrated optical channel waveguide devices

Dilip K. Paul; Brian G. Markey; Robert H. Hefele; Benjamin A. Pontano

doi:10.1117/12.147111

1 July 1993 Organic polymer integrated optical channel waveguide devices

Dilip K. Paul, Brian G. Markey, Robert H. Hefele, Benjamin A. Pontano

Proceedings Volume 1849, Optoelectronic Interconnects; (1993) https://doi.org/10.1117/12.147111
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States

Abstract

Results of e-beam-written electro-optic (EO) organic polymeric integrated optical (IO) channel waveguide devices developed for onboard satellite applications are reported. Processing for both strip-loaded and ridge guide structures was developed to fabricate several types of devices, such as linear and curved waveguides, optical power splitters, combiners, and phase modulators, on a 3-in.-diameter silicon wafer. A large number of polished, butt-coupled devices were tested for optical loss and EO modulation at 830- and 1,310-nm wavelengths. These devices are highly reproducible, capable of very high frequency modulation (currently at 18 GHz) with a small rf drive (0 dBm), and can be made reasonably long if required. For the optical phase modulation measurements, both subcarrier modulation with phase-sensitive detection by a lock-in amplifier, and direct detection of the rf-modulated optical carrier in a lightwave analyzer, were used. The short- and long-term stability of the corona-poled EO polymer films investigated by second harmonic generation were found to be good. IO channel waveguide development considerations leading to above performance characteristics also are presented.

Citation Download Citation

Dilip K. Paul, Brian G. Markey, Robert H. Hefele, and Benjamin A. Pontano "Organic polymer integrated optical channel waveguide devices", Proc. SPIE 1849, Optoelectronic Interconnects, (1 July 1993); https://doi.org/10.1117/12.147111

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