Registration error measurements with coherent optical processors

Xian-Yang Cai; Frank Kvasnik; Roy W. Blore

doi:10.1117/12.144815

6 May 1993 Registration error measurements with coherent optical processors

Xian-Yang Cai, Frank Kvasnik, Roy W. Blore

Proceedings Volume 1907, Machine Vision Applications in Industrial Inspection; (1993) https://doi.org/10.1117/12.144815
Event: IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 1993, San Jose, CA, United States

Abstract

A microscope coherent optical processor (M-COP) has been specifically applied to the measurement of registration error in multi-layer integrated circuit wafers. This novel technique has resulted in a simple and elegant method for the inspection of both part- and fully-processed semiconductor wafers. The conventional methods of processed wafer inspection comprise of microscopical examination by skilled operators, extensive electrical parameter testing, and numerical image-processing. To apply any one of these techniques to a single chip on a wafer is extremely time consuming, and the number of samples that can be inspected on a production line is severely limited. However, real-time 100% inspection of wafers is one of the benefits of the inherent high resolution and immense speed of the M-COP. Further benefits are the early detection and location of faults, 100% quality assurance, and continuous condition monitoring.

Citation Download Citation

Xian-Yang Cai, Frank Kvasnik, and Roy W. Blore "Registration error measurements with coherent optical processors", Proc. SPIE 1907, Machine Vision Applications in Industrial Inspection, (6 May 1993); https://doi.org/10.1117/12.144815

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available