Solvents in novolak synthesis

Chet J. Sobodacha; Thomas J. Lynch; Dana L. Durham; Valerie R. Paradis

doi:10.1117/12.154793

15 September 1993 Solvents in novolak synthesis

Chet J. Sobodacha, Thomas J. Lynch, Dana L. Durham, Valerie R. Paradis

Proceedings Volume 1925, Advances in Resist Technology and Processing X; (1993) https://doi.org/10.1117/12.154793
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

Novolac resins may be prepared with or without a solvent present. We have found that solvent power greatly affects the properties of the finished resin and thus gives the resist chemist another variable with which to `fine-tune' resist properties. Using designed experiments, we investigated the effect of solvent power, as measured by Hansen's Solubility Parameters, of a number of solvents and solvent mixtures on the final properties of the novolac resin. We found that the relative molecular weight (RMW) and dissolution rate of a novolac resin can be varied by selection of a solvent or solvent mixture with the appropriate polarity and hydrogen- bonding characteristics. The solvent polarity and hydrogen-bonding characteristics may affect the stability of the cresol/formaldehyde transition state, thus causing the observed changes in RMW and dissolution rate.

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Chet J. Sobodacha, Thomas J. Lynch, Dana L. Durham, and Valerie R. Paradis "Solvents in novolak synthesis", Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); https://doi.org/10.1117/12.154793

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