Antireflection-coated arrays of binary lenses for interconnection networks at 1.5 um

Margit Ferstl; Berndt Kuhlow; Edgar Pawlowski

doi:10.1117/12.165678

15 December 1993 Antireflection-coated arrays of binary lenses for interconnection networks at 1.5 μm

Margit Ferstl, Berndt Kuhlow, Edgar Pawlowski

Proceedings Volume 1992, Miniature and Micro-Optics and Micromechanics; (1993) https://doi.org/10.1117/12.165678
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Arrays of two different sizes, each consisting of 16 by 16 blazed Fresnel zone lenses, were fabricated in quartz glass by means of microstructuring techniques. The lenses were designed for free space optical interconnection networks operating in the IR. In order to achieve high diffraction efficiencies the kinoform profile of the microlenses was approximated by a staircase-like profile. The fabrication of the lenses involved multiple steps of repeated pattern transfer by photolithography and successive reactive ion etching. We fabricated Fresnel zone lenses with 16 levels per zone and with different focal lengths. The individual elements of the two arrays have circular and square apertures with a diameter of 2 mm and 200 micrometers respectively and were designed to operate at a wavelength of 1.52 micrometers .

Citation Download Citation

Margit Ferstl, Berndt Kuhlow, and Edgar Pawlowski "Antireflection-coated arrays of binary lenses for interconnection networks at 1.5 μm", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165678

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available