Scattering signatures of isolated surface features

Carina Kylner; Joakim P. Ingers; Lars H. Mattsson; Mans Bjuggren

doi:10.1117/12.162657

1 December 1993 Scattering signatures of isolated surface features

Carina Kylner, Joakim P. Ingers, Lars H. Mattsson, Mans Bjuggren

Proceedings Volume 1995, Optical Scattering: Applications, Measurement, and Theory II; (1993) https://doi.org/10.1117/12.162657
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

A rigorous one-dimensional integral solution has been utilized to bring up some ideas about possible ways for detecting isolated surface defects by means of angle resolved scattering. Our preliminary results indicate that a suitable combination of polarization and different incidence angles can be useful. Numerical examples are given both for modelled defects and real defects measured with a Talystep profilometer.

Citation Download Citation

Carina Kylner, Joakim P. Ingers, Lars H. Mattsson, and Mans Bjuggren "Scattering signatures of isolated surface features", Proc. SPIE 1995, Optical Scattering: Applications, Measurement, and Theory II, (1 December 1993); https://doi.org/10.1117/12.162657

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