Mechanism for surface fitting of interferometric slope data

David J. Fischer; H. Philip Stahl

doi:10.1117/12.165455

10 December 1993 Mechanism for surface fitting of interferometric slope data

David J. Fischer, H. Philip Stahl

Proceedings Volume 2003, Interferometry VI: Techniques and Analysis; (1993) https://doi.org/10.1117/12.165455
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

One approach for obtaining a surface representation is to fit Zernike polynomials (in a least squares sense) to discrete data points in the full aperture. The mathematics for this have been described using both matrix and vector notation. Additionally, vector notation has been used to describe how to obtain a surface representation from orthogonal (x, y) slope data. The result of that paper was a matrix operator for linearly combining the first eight Zernike polynomial coefficients fit to x- and y-slope data to produce a Zernike polynomial surface representation. This paper extends that process by presenting a systematic approach for obtaining the linear relationship between slope and surface using the first 49 Zernike polynomials.

Citation Download Citation

David J. Fischer and H. Philip Stahl "Mechanism for surface fitting of interferometric slope data", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165455

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