Sputtered iridium coatings for grazing incidence x-ray reflectance

John S. Bessey; James A. Roth

doi:10.1117/12.167202

1 February 1994 Sputtered iridium coatings for grazing incidence x-ray reflectance

John S. Bessey, James A. Roth

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167202
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

The Advanced X-ray Astrophysics Facility--Imaging is one of two complementary space-based x-ray observatories being developed by NASA. Utilizing grazing incidence mirror elements in a Wolter Type I configuration, it will image x-ray sources over an energy range of 0.1 to 10 KeV. This paper describes the deposition of iridium/chromium coatings on Zerodur substrates using DC magnetron sputtering for use in grazing incidence configuration. Included are a description of the configuration and parameters of the deposition process, the results of x-ray performance measurements, and the implications of the results for scaling the deposition process to the full scale AXAF-I mirror elements.

Citation Download Citation

John S. Bessey and James A. Roth "Sputtered iridium coatings for grazing incidence x-ray reflectance", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167202

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