Simulation and interpretation of scanning electron microscope images

Maya Balasubramanyam; Eric Munro; Jim Taylor

doi:10.1117/12.155690

3 September 1993 Simulation and interpretation of scanning electron microscope images

Maya Balasubramanyam, Eric Munro, Jim Taylor

Proceedings Volume 2014, Charged-Particle Optics; (1993) https://doi.org/10.1117/12.155690
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Scanning Electron Microscope (SEM) image simulation techniques have recently started to be used as a means of quantitative interpretation of SEM micrographs. A method of image simulation has been developed which takes into account image formation processes from the point of impact of the primary beam on the sample to the point of electron collection by the detector. Firstly the interaction between the specimen and the primary beam is modelled in order to determine the distribution of the electrons emitted from the specimen. The beam/specimen interaction model is based on original Monte Carlo programs by Joy and Luo. The paths of the electrons in the specimen chamber are then computed using software by Rouse. Images of a variety of samples with various surface topographies were simulated and the effect of varying the detector configuration was studied. All computations were performed using a 80486 Personal Computer. The results were then compared with micrographs taken using a Leica Cambridge S360 SEM.

Citation Download Citation

Maya Balasubramanyam, Eric Munro, and Jim Taylor "Simulation and interpretation of scanning electron microscope images", Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); https://doi.org/10.1117/12.155690

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available