Novel cantilever-beam field-emission pressure sensor

Ruey-Shing Star Huang; Hsien-Chung Lee; Mark Gross; C. M. Horwitz

doi:10.1117/12.156490

22 September 1993 Novel cantilever-beam field-emission pressure sensor

Ruey-Shing Star Huang, Hsien-Chung Lee, Mark Gross, C. M. Horwitz

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156490
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

Due to an increasing interest in the study of field emission emitters for vacuum microelectronic devices a variety of new designs on cold cathodes were reported. In this paper we will report a novel pressure sensor utilizing the field-emission from two cantilever beams on a thin pressure sensitive silicon diaphragm. A simulation of the normalized output current as a funcfion of applied pressure is presented. Results of experimental cantilever-beam field-emission pressure sensor and some of the emission phenomena are reported.

Citation Download Citation

Ruey-Shing Star Huang, Hsien-Chung Lee, Mark Gross, and C. M. Horwitz "Novel cantilever-beam field-emission pressure sensor", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156490

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