Super-precise measurement system controlled by computer in a servo-writer

Lian Xing Jia; Shengsheng Yu; Zhimin Yuan

doi:10.1117/12.156408

22 September 1993 Super precise measurement system controlled by computer in a servo writer

Lian Xing Jia, Shengsheng Yu, Zhimin Yuan

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156408
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

The paper gives a realization of the positioning system in a servo-writer, and discusses the Super Precise Measurement System controlled by a computer in detail. It gives a parallel 16-bit interface circuit with higher data transmission ratio, and analyses the facters which affect the measurement accuracy. The measurement accuracy of the system for the position is O.O2μm.

Citation Download Citation

Lian Xing Jia, Shengsheng Yu, and Zhimin Yuan "Super precise measurement system controlled by computer in a servo writer", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156408

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