Ion beam sputtering of optical coatings

A. F. Stewart; Samuel M. Lu; Mohammad M. Tehrani; C. Volk

doi:10.1117/12.180878

28 July 1994 Ion beam sputtering of optical coatings

A. F. Stewart, Samuel M. Lu, Mohammad M. Tehrani, C. Volk

Proceedings Volume 2114, Laser-Induced Damage in Optical Materials: 1993; (1994) https://doi.org/10.1117/12.180878
Event: Laser-Induced Damage in Optical Materials: 1993, 1993, Boulder, CO, United States

Abstract

Ion beam sputtering (IBS) is an easily controlled, energetic deposition process. Thin film coatings produced using IBS are superior in terms of scatter, absorption, losses and homogeneous optical properties. The process and properties of coatings produced using IBS will be discussed.

Citation Download Citation

A. F. Stewart, Samuel M. Lu, Mohammad M. Tehrani, and C. Volk "Ion beam sputtering of optical coatings", Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); https://doi.org/10.1117/12.180878

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available