Quasi-optical instrument for thickness measurements

A. A. Vertiy

doi:10.1117/12.2303226

1 January 1994 Quasi-optical instrument for thickness measurements

A. A. Vertiy

Proceedings Volume 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994; 22505T (1994) https://doi.org/10.1117/12.2303226
Event: Millimeter and Submillimeter Waves and Applications: International Conference, 1994, San Diego, CA, United States

Abstract

Two schemes of the thickness gauges of metal and dielectric sheets are discussed in this report. We suggest to use quasi-optical Barrel-Shaped open resonator (BOR) specially designed as high-accuracy thickness sensor for thin metal sheets and two channel interferometer with the consecutive round of both sides of the metal sheet and modulator in the reference channel.

Citation Download Citation

A. A. Vertiy "Quasi-optical instrument for thickness measurements", Proc. SPIE 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994, 22505T (1 January 1994); https://doi.org/10.1117/12.2303226

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