Noncontact measuring profile of magnetic disk with optical methods

Yang Zhao; Dacheng Li; Mang Cao; Jia Wang

doi:10.1117/12.182181

5 August 1994 Noncontact measuring profile of magnetic disk with optical methods

Yang Zhao, Dacheng Li, Mang Cao, Jia Wang

Proceedings Volume 2321, Second International Conference on Optoelectronic Science and Engineering '94; (1994) https://doi.org/10.1117/12.182181
Event: Optoelectronic Science and Engineering '94: International Conference, 1994, Beijing, China

Abstract

The paper discusses some optical methods of measuring the profile of disk non-contacting. Grazing incident interferometer, Color schieren, and Moire deflectometer. Especially in the paper a new measuring method and instrument is introduced which is a pointwise instrument with an optical probe. It can measure a global and local profile of a disk in tangential and radial direction at the same time, without sacrificing the measurement accuracy. The resolution of the probe is 0.3 nm, the instrument accuracy better than 0.04 micrometers , the dynamic range larger than 5 mm.

Citation Download Citation

Yang Zhao, Dacheng Li, Mang Cao, and Jia Wang "Noncontact measuring profile of magnetic disk with optical methods", Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); https://doi.org/10.1117/12.182181

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